This paper presents an electrostatically actuated, normally closed microvalve for parylene microfluidics. The proposed valve structure isolates the fluid from the electric field, and hence results in relatively low actuation ...

This paper presents an electromagnetic (EM) micro-power generator with tunable resonance frequency which can harvest energy from low frequency environmental vibrations. The reported power generator up-converts low frequency ...

This paper presents analysis and implementation of a simple electrostatic microvalve designed for use in parylene-based lab-on-a-chip devices. The microvalve utilizes an in-plane collapsing diaphragm. To investigate the ...