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Analysis and characterization of an electrostatically actuated in-plane parylene microvalve

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dc.contributor.author Yıldırım, Ender
dc.contributor.author Kulah, Haluk
dc.date.accessioned 2016-08-12T07:50:21Z
dc.date.available 2016-08-12T07:50:21Z
dc.date.issued 2011-10
dc.identifier.citation Yıldırım, E., Külah, H. (2011). Analysis and characterization of an electrostatically actuated in-plane parylene microvalve. Journal of Micromechanics and Microengineering, 21(10). http://dx.doi.org/10.1088/0960-1317/21/10/105009 tr_TR
dc.identifier.issn 0960-1317
dc.identifier.uri http://hdl.handle.net/20.500.12416/1227
dc.description.abstract This paper presents analysis and implementation of a simple electrostatic microvalve designed for use in parylene-based lab-on-a-chip devices. The microvalve utilizes an in-plane collapsing diaphragm. To investigate the pull-in behavior of the diaphragm and flow characteristics, a thorough analysis is carried out using the finite element method. Microvalves with different diaphragm radii are fabricated using surface micromachining techniques. Pull-in tests are carried out under the no-flow condition with air, oil and water as the working fluid. Test results show that the pull-in occurs around 20 V for 450 mu m radius diaphragms with oil and air. However, it is not possible to observe pull-in up to 100 V (both ac and dc) for the case of water as the working fluid, due to its relatively high dielectric constant and conductivity. The flow tests show that no leakage flow was observed up to 4 kPa inlet pressure under 85 V actuation potential. The leakage ratio becomes 17% at 10 kPa inlet pressure. It is observed that the leakage can be reduced controllably by increasing the actuation potential, enabling the precise control of the flow rate tr_TR
dc.language.iso eng tr_TR
dc.publisher IOP Publishing LTD tr_TR
dc.relation.isversionof 10.1088/0960-1317/21/10/105009 tr_TR
dc.rights info:eu-repo/semantics/closedAccess
dc.subject Large-Scale Integration tr_TR
dc.subject Microfluidic Devices tr_TR
dc.subject PDMS tr_TR
dc.subject Membrane tr_TR
dc.subject Valves tr_TR
dc.subject Mems tr_TR
dc.subject Chip tr_TR
dc.subject Diaphragm tr_TR
dc.subject Silicon tr_TR
dc.subject System tr_TR
dc.title Analysis and characterization of an electrostatically actuated in-plane parylene microvalve tr_TR
dc.type article tr_TR
dc.relation.journal Journal of Micromechanics and Microengineering tr_TR
dc.contributor.authorID 31835 tr_TR
dc.contributor.authorID 120121 tr_TR
dc.identifier.volume 21 tr_TR
dc.identifier.issue 10 tr_TR
dc.contributor.department Çankaya Üniversitesi, Mühendislik Fakültesi, Makine Mühendisliği Bölümü tr_TR


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