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Browsing Makine Mühendisliği Bölümü Yayın Koleksiyonu by Subject "Abrasives"

Browsing Makine Mühendisliği Bölümü Yayın Koleksiyonu by Subject "Abrasives"

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  • Technological Advances and Challenges in Chemical Mechanical Polishing 
    Nadimi Bavil Oliaei, Samad; Mukhtarkhanov, Muslim; Perveen, Asma (2020)
    It has been already several decades since chemical mechanical polishing (CMP) process has been deployed as a planarization technique for the fabrication of integrated circuit (IC) in the semiconductor industries. CMP is ...