Özet:
In this study, an optical pressure sensor is designed to
sense a force. To achieve that, an interdigitated capacitor
connected to a spiral inductor that oscillates at GHz region
is proposed to be designed. To sense a force with very low
amplitude, some different materials are applied as a
dielectric material between the layers of the interdigitated
capacitor. Thus, by applying the force, the circuit’s
capacitance is changed due to the displacement of the
selected dielectric. This leads to change of the circuit's
scattering parameters which lets to sense the lowest scale of
the pressure possible. For simulation, the circuit is designed
in COMSOL, theoretically studied the scattering parameters
and the effect of the force on the circuit characteristic and
finally, Advanced Design System is used to optimize the
parameters for this specific aim