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A normally closed electrostatic parylene microvalve for micro total analysis systems

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dc.contributor.author Yıldırım, Ender
dc.contributor.author Arıkan, M. A. Sahir
dc.contributor.author Kulah, Haluk
dc.date.accessioned 2017-06-09T12:13:24Z
dc.date.available 2017-06-09T12:13:24Z
dc.date.issued 2012-07
dc.identifier.citation Eıldırım, E., Arıkan, M.A.S., Külah, H. (2012). A normally closed electrostatic parylene microvalve for micro total analysis systems. Sensors And Actuators A-Physical, 181, 81-86. http://dx.doi.org/10.1016/j.sna.2012.05.008 tr_TR
dc.identifier.issn 0924-4247
dc.identifier.uri http://hdl.handle.net/20.500.12416/1620
dc.description.abstract This paper presents an electrostatically actuated, normally closed microvalve for parylene microfluidics. The proposed valve structure isolates the fluid from the electric field, and hence results in relatively low actuation potentials (<60 V) irrespective of the working fluid. Hereby, the microvalve solves electrolysis or electrode shielding problems observed in electrostatic actuation in micro total analysis systems. To investigate leakage properties, microvalves were tested under pressurized flow with de-ionized (DI) water. No detectable leakage ratio was observed up to 20 kPa inlet pressure, due to the unique semicircular valve seat design. It was shown that the valve seat could be reconfigured to enable sealing at various pressure levels for different applications. tr_TR
dc.language.iso eng tr_TR
dc.publisher Elsevier Science SA tr_TR
dc.relation.isversionof 10.1016/j.sna.2012.05.008 tr_TR
dc.rights info:eu-repo/semantics/closedAccess
dc.subject Microvalve tr_TR
dc.subject Parylene tr_TR
dc.subject Electrostatic tr_TR
dc.subject Micro Total Analysis Systems tr_TR
dc.title A normally closed electrostatic parylene microvalve for micro total analysis systems tr_TR
dc.type article tr_TR
dc.relation.journal Sensors And Actuators A-Physical tr_TR
dc.contributor.authorID 120121 tr_TR
dc.identifier.volume 181 tr_TR
dc.identifier.startpage 81 tr_TR
dc.identifier.endpage 86 tr_TR
dc.contributor.department Çankaya Üniversitesi, Mühendislik Fakültesi, Makine Mühendisliği Bölümü tr_TR


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