Abstract:
This paper presents a novel electrostatic microvalve
to control in-plane flow on parylene based
lab-on-a-chip-devices. Normally-closed design of the
microvalve insulates the working fluid from the electric
field, while providing low leakage up to 40 kPa inlet
pressure. Prototypes are fabricated and tested for pull-in
and flow characterization. Pull-in voltage is measured to
be 150 V independent of the working fluid. No leakage is
detected up to 20 kPa inlet pressure.