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An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications

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dc.contributor.author Yıldırım, Ender
dc.contributor.author Arıkan, M. A. Sahir
dc.contributor.author Kulah, Haluk
dc.date.accessioned 2020-05-12T05:05:36Z
dc.date.available 2020-05-12T05:05:36Z
dc.date.issued 2011
dc.identifier.citation Yildirim, E.; Kulah, H.; Arikan, M.A.S.,"An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications", 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, pp. 250-253, (2011). tr_TR
dc.identifier.isbn 978-145770157-3
dc.identifier.uri http://hdl.handle.net/20.500.12416/3720
dc.description.abstract This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure. tr_TR
dc.language.iso eng tr_TR
dc.relation.isversionof 10.1109/TRANSDUCERS.2011.5969441 tr_TR
dc.rights info:eu-repo/semantics/openAccess tr_TR
dc.subject Microvalve tr_TR
dc.subject Parylene, tr_TR
dc.subject Electrostatic, tr_TR
dc.subject In-plane tr_TR
dc.title An Electrostatically Actuated Parylene Microvalve for Lab-On-A-Chip Applications tr_TR
dc.type conferenceObject tr_TR
dc.relation.journal 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11 tr_TR
dc.contributor.authorID 31835 tr_TR
dc.identifier.startpage 250 tr_TR
dc.identifier.endpage 253 tr_TR
dc.contributor.department Çankaya Üniversitesi, Mühendislik Fakültesi, Makine Mühendisliği Bölümü tr_TR


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